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Your future responsibilities Development of new dry etch processes for new materials with a state-of-the-art etching tool Thin film surface characterization (incl.SEM, EDX, ellipsometry, AFM, XPS) Design and execution of advanced experiments, data...
Your future responsibilities Microsystems based on piezoelectric transduction are an important class of microelectromechanical systems (MEMS). Upon other material properties, a high crystalline quality of the involved thin films incl. electrodes a...
Your future responsibilities The main goal of the project is to investigate the influence of plasma discharge parameters in inductively coupled conditions on etch performance and quality of LiNbO3 based PIC structures. Simulation and modeling me...